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Open Frame Stages for Upright Microscopes
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Part # |
Stage Travel |
Resolution |
Repeatability* |
Accuracy* |
Data Sheet |
| H101 | 108 x 73 mm (4 x 3 inches) | To .02 µm | ±1 µm(±0.7 with linear scales) | ±3 µm |  |
| H138 | 230 x 71 mm (9 x 3 inches) | To .04 µm | ±3 µm (±1.0 with linear scales) | ±10 µm |  |
| H105 | 153 x 153 mm (6 x 6 inches) | To .04 µm | ±2 µm (±1.0 with linear scales) | ±8 µm(±1 µm with linear scales) | |
| H116 | 256 x 215 mm (10 x 8.5 inches) | To .04 µm | ±5 µm (±2.0 µm with linear scales) | ±10 µm(±1 µm with linear scales) | |
| H112 | 300 x 300 mm (12 x 12 inches) | To .04 µm | ±5 µm (±2.5 with linear scales) | ±20 µm(±1 µm with linear scales) | |
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Stages for Inverted Microscopes
|
Part # |
Stage Travel |
Resolution |
Repeatability* |
Accuracy* |
Data Sheet |
| H107 | 108 x 69 mm (4 x 3 inches) | To .02 µm | ±1 µm | ±3 µm | |
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Motorized Semi-Conductor Wafer Shuttle Stage
|
Part # |
Holder |
Data Sheet |
| 500-HR05SP | Stage and shuttle for 4/6 inch wafers on Olympus AL100 | |
| 500-HR05SPN | Stage and shuttle for 4/6 inch wafers on Nikon NWL 641 | |
| 500-H116SP | Stage and shuttle for 6/8 inch wafers on Olympus AL100 | |
| 500-H116SPN | Stage and shuttle for 8 inch wafers on Nikon NWL 860 |
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X-Theta Stages
|
Part # |
Stage Travel |
Resolution |
Repeatability* |
Accuracy* |
Data Sheet |
| H101XTH | 108 mm in X, 360° in Theta | To .02 µm in X, 0.01° in Theta | ±1 µm in X, better than ±0.20° in Theta | ±3 µm in X | |
| H138XTH | 230 mm in X, 360° in Theta | To .02 µm in X, 0.01° in Theta | ±3 µm in X, better than ±0.20° in Theta | ±5 µm in X | To follow |